Application Note
High-speed composition and chemical analysis of nanoelectronic materials with GIF Continuum
January 1, 2024
Zirconium
Element density: 6.51 g/cm3
Electron configuration: [Kr]4d25s2
Oxidation states: +4
Edges
Explore electron energy loss spectroscopy (EELS) reference spectra, featuring major and minor edges used for elemental identification and chemical state analysis in materials research.
Major edges | |||
|---|---|---|---|
K | 17998 |
|  |
L2 | 2307 |  |  |
L3 | 2222 | | |
M4 | 182 |
| |
M5 | 180 |
| |
N2,3 | 29 |  | |
Minor edges | |||
|---|---|---|---|
L1 | 2532 |
| |
M1 | 430 |
|  |
M2 | 344 |  |  |
M3 | 331 | | |
N1 | 51 |
| |
Considerations
M4,5-edges at low energy and delayed. L-edges typically give high SNR for mapping.
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Related spectral data
ZrO2 thin film (0 – 920 eV)
Material analyzed: ZrO2
Related elements: Zirconium, Oxygen
Data contributor: Gatan
Beam energy (keV): 200
Nominal energy range (eV): 0 – 920
Collection semi-angle effective (mrad): 100
Notes: Serial EELS; zero-loss peak intensity = 7.72e8; total elastic int. / zero-loss int. = 0.26; gain change factor = 211; 110 sweeps 20 ms dwell
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