EFTEM SI Setup
When configuring the system for EFTEM Spectrum Imaging (SI) acquisition in DigitalMicrograph® software, use the EFTEM SI Setup dialog to define acquisition parameters.
EFTEM SI is available in Basic and Advanced modes. This section describes the workflow for configuring the Basic version.
Open the EFTEM SI Setup dialog
- Select the primary EFTEM SI technique.
- Click Setup to open the EFTEM SI Setup dialog.
The dialog is organized into several groups of related parameters.

Energy Range
These settings define the energy range and sampling of the EFTEM SI acquisition.
- Range – Specifies the total energy range over which the EFTEM SI is acquired.
- Slit Width – Defines the energy‑selecting slit width used during acquisition.
- Step – Sets the energy step size between successive image planes.
- Link – When enabled, automatically sets the Step Size equal to the Slit Width.
Detector
This section contains parameters used to reconfigure the detector for EFTEM SI acquisition.
Options
Optional settings that modify acquisition behavior.
Acquire High to Low – Reverses the acquisition direction of the energy series.
Acquiring high‑to‑low energy is recommended to reduce detector after‑flow effects.Align ZLP – Performs zero‑loss peak (ZLP) alignment before acquiring the spectrum image.
This option is not recommended, as it frequently causes ghosting of the zero‑loss image in the EFTEM SI dataset.
Once these parameters are configured, the system is ready to proceed with EFTEM spectrum imaging acquisition.
