Quantification
Once you acquire a spectrum or a collection of spectra, you must extract information from that data. Here, we will discuss how to identify which elements are present and best practices to extract and quantify elemental-specific information to determine sample composition.
A typical analysis follows these steps:
Choose Suitable Edges
Select isolated, high-signal ionization edges with minimal overlap
Identify Edge Features
Identify and interpret key edge features in the spectrum
Assess Sample Thickness
Measure sample thickness from EELS data with a precise, data-driven approach
Plural Scattering
Account for plural scattering and sample thickness
Extract Element-Specific Signal(s)
Isolate the relevant EELS signal from the background
Quantify Extracted Signal
Convert the extracted EELS signal into quantitative results
Proceed to the next page for step-by-step instructions for quantifying your data using DigitalMicrograph® 3 software.
