Ease of Use

The table below begins to capture the main usage features of each technique.

	EELS	EDS	XPS	Auger	CL
Probe → Signal	e^- → e^-	e^- → γ	γ → e^-	e^- → e^-	e^- → hv
Sample requirements	Thin (<1 – 2 mfp) for best results	Semi-thin to bulk Flat surface for bulk	Bulk – Ultra-high vacuum (UHV) compatible Flat surface	Semi-thin to bulk – UHV compatible Flat surface for bulk Non-charging	Semi-thin to bulk Optically active
Technique	Requires setup of electron optics	Minimal setup	UHV handling	UHV handling Methods to reduce charging	Requires setup of a spectrometer
Composition analysis	No standards for analysis			Compare to standards	N/A
Chemical analysis	Fingerprinting/energy shift	None	Fingerprinting	Limited	Depends on material

For more information about the cathodoluminescence technique, please visit WhatIsCL.info, an educational website.

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