Fundamentals of electron energy-loss spectroscopy

Electron energy-loss spectroscopy (EELS) is an analytical technique that is based on inelastic scattering of fast electrons in a thin specimen. In a transmission electron microscope (TEM) it can provide structural and chemical information about a specimen, even down to atomic resolution. This review provides an overview of the physical basis and new developments and applications of EELS in scanning transmission electron microscopy.